![]() In conclusion, the proposed flexure mechanism exhibits superior performance and can be used across a wide range of applications. This paper presents a model reference of position estimator controller for controlling XY stage Flexure Mechanism. Preliminary experimental results pertaining to the mechanism's translational actuating stiffness and bandwidth were in agreement with the FEA predictions as the deviation was within 10%. Hence, the high stiffness ratios of the proposed mechanism are achieved without compromising its dynamic performance. In comparison, the bandwidth of similar existing flexure mechanisms that can deflect more than 0.5 mm or 0.5° is typically less than 45 Hz. Despite having such a large workspace, FEA also predicts that the proposed mechanism can still achieve a high bandwidth of 70 Hz. Meso-scale parallel-kinematics nano-positioning xy flexure stage. XY FLEXTURE SERIES3-Channel Piezo Controller with Standard Piezo XYZ Flexure Stage MDE623 Complete system comprising the E1100 3-channel controller together with the MDE123 Elliot Gold Series XYZ flexure stage fitted with piezo actuators providing 25 m of piezo tr. Based on finite element analysis (FEA), it has translational stiffness ratio of 248, rotational stiffness ratio of 238 and a large workspace of 2.50 mm × 2.50 mm × 10°. Compact XY flexure stages that provide large range of motion are desirable in several applications, such as semiconductor mask and wafer alignments (1). The positioning mechanism includes an actuator and a flexure structure engaged by the. MDE623 - 3-Channel Piezo Controller with XYZ Flexure Stage. Here, we present an optimal XY θz flexure mechanism, which is designed to have maximum stiffness ratios. As a result, these XY θz flexure mechanisms are unable to fully optimize their workspace and capabilities to reject disturbances. ![]() Although maximizing the stiffness ratios is a very critical design requirement, the achievable translational and rotational stiffness ratios of existing XY θz flexure mechanisms are still restricted between 0.5 and 130. Ns-xy400-01 China Manufacturer Of Precision Linear Xy Flexure Nano Positioning Table Pzt Stack Nanopositioning Linear Stages, Find Complete Details about. Volume 7: 29th Mechanisms and Robotics Conference, Parts A and B. The development of optimal XY θz flexure mechanisms, which can deliver high precision motion about the z-axis, and along the x- and y-axes is highly desirable for a wide range of micro/nano-positioning tasks pertaining to biomedical research, microscopy technologies and various industrial applications. 'Design of Parallel Kinematic XY Flexure Mechanisms.' Proceedings of the ASME 2005 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ![]()
0 Comments
Leave a Reply. |
AuthorWrite something about yourself. No need to be fancy, just an overview. ArchivesCategories |